| Project UID | CORE10 |
|---|---|
| Course | MM 305: Kinetics of Processes |
| Project Department | MEMS |
| Title of Project | Kinetic Modelling of CVD Film Growth in Horizontal Tube Reactor |
| Name of Professor | Triratna Muneshwar |
| Year of Study Criteria | Both 2nd Year and 3rd Year UGs |
| Project Description | Construct a kinetic model describing CVD thin film deposition process relating film growth rate (in nm/s) to the reactor dimensions and process conditions such as pressure, substrate temperature, flow rate reactant(s), etc., for deposition in a horizontal tube reactor. |
| Concepts Required | Reaction kinetics, Reactor design |
| Learning Outcomes | Appreciate the fundamental reaction kinetic concepts and get hands-on experience in applying these concepts to investigate the CVD deposition process. |
| Expectations From Students | Willingness to learn, explore, and investigate; Self-driven |
| Things To Note | Some alternate material combinations and directions for alternate designs could be the outcomes based on the review of the literature. |
Dive deep in the realm of Academic and Industry related research projects
Created with ❤️ by UGAC Web Team, 2023-2024